Measuring small volumes

authors: Carlo Ferri, Atanas Ivanov

A method for measuring small volumes of solids with irregular and complex boundaries of both convex and concave shape is presented. The term ‘small’ refers to the micro scale but can potentially be extended to the sub-micrometric domain. The proposed method is based on a white light interferometer microscope (WLI), which constitutes the source of measurement data subsequently elaborated using purpose developed numerical algorithms. The method hinges on the identification of a geometrical reference on the measurand itself. Its main benefit, therefore, is the independence of the measuring results from the positioning of the part on the instrument stage. A validation of the developed algorithm is also provided. The method is then demonstrated on a convex micro part, a shaped electrode for the micro electric discharge machining process (micro EDM). Finally, its performance in term of precision under repeatability conditions is estimated for the particular case of the demonstrated part

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